Photomask Fabrication Technology

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August 2005



Photomasks are defect-free optical templates -- the printing masters for the fabrication of integrated circuits (ICs). When IC feature sizes fall below the exposure tool's source wavelength, photomask fabrication becomes difficult: very strict mask critical dimension (CD) and feature placement specifications, intensive capital equipment investment, unique raw materials and applications, and special expertise requirements for photomask fabrication technologists are necessary to fabricate modern microelectronics. Thus the rapid recent growth of the field and the need for this book.This text details the science and technology of industrial photomask production, including fundamental principles, industrial production flows, technological evolution and development, and state of the art technologies. Focusing on industrial applications rather than pure science, the goal of the book is to provide a comprehensive reference for any engineer developing microelectronic manufacturing processes


IntroductionData Preparation and DesignPattern GenerationPattern TransferPhotomask MetrologyDefect Control and FinishingInspection, Repair, and CleaningResolution Enhancement TechniquesWater Fabrication IssuesFuture DevelopmentsAppendicesReferences


Benjamin G. Eynon, Jr. (Austin, TX) is currently Director of Advanced Technology Development at Photronics, Inc. He has over 18 years of experience in the semiconductor industry in technology development and manufacturing. He sits on a number of international professional conferences committees, and is a reviewer of peer-reviewed technology journal articles. He holds two US patents and has over 25 professional publications.
EAN: 9780071445634
ISBN: 0071445633
Untertitel: 'Professional Engineering'. New. Sprache: Englisch.
Erscheinungsdatum: August 2005
Seitenanzahl: 500 Seiten
Format: gebunden
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