An Introduction to Microelectromechanical Systems Engineering 2nd Ed.
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BeschreibungNow in its second edition, this guide brings readers up-to-date with the latest developments in RF MEMS and photonic MEMS, and how projects may benefit from a MEMS solution.
InhaltsverzeichnisMEMS: A Technology from Lilliput. The Sandbox: Materials for MEMS. The Toolbox: Processes for Micromachining. MEM Structure and Systems in Industrial and Automotive Applications. Optical MEM Structures and Systems. MEM Structures and Systems for Medical Applications. MEM Structures and Systems for Electronic Applications.
PortraitNadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Stanford University. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Stanford University. Kirt Williams is a MEMS consultant based in California's Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley.
Untertitel: Revised. Sprache: Englisch.
Verlag: ARTECH HOUSE INC
Erscheinungsdatum: Juli 2004
Seitenanzahl: 283 Seiten