Handbook of Silicon Based MEMS Materials and Technologies
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BeschreibungThis book explains how bulk micromachining using silicon wafers, supplemented by surface micromachining techniques, produces in new solutions with SOI wafers as starting material. It also explains core concepts, including deep reactive ion etching (DRIE), lithography of high aspect ratio (HAR) structures, dry and wet etching, with SOI-starting material.
Pressestimmen"This is a comprehensive state-of-the-art guide on MEMS materials and manufacturing for current and future applications. Engineers, materials scientists, and MEMS developers will find this handbook to be an invaluable resource that will not sit on a bookshelf but rather be a well-used reference text used in the development of MEMS devices."--Electrical Insulation "Handbook of Silicon Based MEMS Materials and Technologies was published in April 2010. Altogether 73 leading experts from 12 countries participated to the writing process and the result was nearly 700 pages about materials, modeling, measuring, processes and packaging within silicon based MEMS."--MEMS Blog
Untertitel: Sprache: Englisch.
Verlag: WILLIAM ANDREW PUB
Erscheinungsdatum: Januar 2010
Seitenanzahl: 636 Seiten